CENTRAL FACILITIES

   
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JEOL 6700F
Scanning Electron Microscope

1.0 nm resolution @ 15kV
2.2 nm resolution @ 1kV
Magnification: 25X to 650,000X
Robinson Backscatter Electron Detector
Edax X-ray Micro Analysis System
Phillips X Pert Pro
X-ray Diffraction System

Phase Analysis
Crystallography and Rietveld Analysis
Residual Stress Analysis
Refrectometry on thin layers
High resolution rocking curve analysis
Kurt J. Lesker Magnetron
Sputtering System
Two 2" magnetron-sputtering guns
RF and DC Power supplies
Substrate preheating up to 800° C

 

 

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PHI 610 Scanning Auger Microprobe
Surface Composition
Scanning and Depth Profiling Capabilities
SEM imaging
X-ray Photoelectron Spectrometer
Surface Composition
Elemental Oxidation State
For more information on use and availability contact: Mark Koontz - 410 516-5335
mkoontz@jhu.edu